CVD and CVI Furnace Features
- Cold-wall vacuum furnace design with stainless steel inner and outer jackets and baffled water cooling for easy loading and unloading.
- Graphite resistance-heated hot zones designed to withstand harsh CVD environments.
- Induction heating available for carbon CVI applications and ultra-high-temperature processing.
- Vertical top-loading and bottom-loading furnaces, as well as horizontal rectangular configurations, available based on workpiece size, shape, and quantity.
- Operating temperatures up to 2900°C using state-of-the-art induction heating power supplies, with resistance-heated systems available for lower-temperature applications.
- Vacuum pumping systems include mechanical pumps and blowers, with optional liquid-ring or dry pumping systems. Feedback-controlled throttling valves maintain constant pressure across a wide capacity range, while particulate filters provide protection against abrasion.
- PLC or PC-based control systems using Rockwell FactoryTalk View software customized by Centorr/Vacuum Industries for vacuum furnace operation, extensive data acquisition, and remote operation.
- Inert and process gas systems with electronic mass-flow control provide accuracy, reproducibility, and flexibility for critical CVD applications. Multiple injection nozzle locations allow gas-flow patterns to be adjusted based on the workload.
- Optical pyrometers minimize thermocouple exposure, while corrosion-resistant heated manometers provide absolute pressure sensing independent of gas composition.
Specifications
| STD MODEL* | 8820 | 1824 | 2436 | 161636 | 84120 |
|---|---|---|---|---|---|
| Uniform Effective Hot Zone W x H x L or Dia. x H in (mm) | 8 x 8 x 20 (200 x 200 x 500) | 18 x 24 (460 x 610) | 24 x 36 (610 x 914) | 16 x 16 x 36 (400 x 400 x 914) | 84 x 120 (2133 x 3050) |
| Workload Volume Ft3 (liters) | 0.75 (21) | 3.5 (100) | 9.5 (270) | 5.3 (150) | 385 (10,900) |
| Approx. Power Supply Size KVA | 45 | 150 | 450 | 275 | 750 |
| Water Requirements gpm (liters) | 7 (26) | 30 (114) | 65 (246) | 43 (163) | 125 (473) |
CVD / CVI / CC
- Highest Product Consistency is assured by the close temperature gradients and automatic temperature control of each step in the process.
- Lowest Cost Operation is provided by the rapid heatup step, unattended operation, fast cooldowns.
- Flexibility is provided by the programmable controls which allow different materials and part sizes to be successfully processed without time-consuming adjustment of furnace conditions.
- Minimum Maintenance Cost is assured by the heavy construction and ease of access to all components of the furnace.
Options
Optional Features- Powered Cover lift for top loading models, and Elevator Hearth for bottom loaders.
- Effluent capture including scrubbers or liquid ring pumps / dry pumps.
- Inert and Process Gas Management and Distribution systems for MTS, BCl3, H2, CH4, and C3H8.
- Graphite Retort for containment of process coating, with differential pumping.
- Work Rotation devices and Gas Injection lances available.
- Vacuum pump oil filtration systems and vacuum inert gas purge lines.
Application
- Chemical Vapor Deposition (CVD): Deposition of high-purity solid materials from vapor-phase precursors for advanced material production.
- Chemical Vapor Infiltration (CVI): Infiltration of porous structures to produce high-density carbon-carbon and ceramic matrix composites (CMCs).
- Graphite Purification: High-temperature processing of graphite to remove impurities for applications requiring high-purity materials.
- Graphitization: Ultra-high-temperature thermal processing for conversion of carbon materials to a graphitic structure.
Contact Us
800.962.8631
603.595.7233
